\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5b9a\u4e49\u4e0e\u4f5c\u7528<\/h3>\n

\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u5728\u7cbe\u5bc6\u5236\u9020\u4e2d\u5e7f\u6cdb\u5e94\u7528\u7684\u5173\u952e\u8bbe\u5907\uff0c\u5176\u4e3b\u8981\u529f\u80fd\u662f\u901a\u8fc7\u6db2\u4f53\u4ecb\u8d28\u5b9e\u73b0\u5bf9\u7a7a\u6c14\u6216\u6c14\u4f53\u4e2d\u7684\u5fae\u5c0f\u9897\u7c92\u7269\u3001\u6709\u5bb3\u7269\u8d28\u53ca\u6c61\u67d3\u7269\u7684\u9ad8\u6548\u53bb\u9664\u3002\u8fd9\u79cd\u8fc7\u6ee4\u5668\u901a\u5e38\u7531\u6db2\u69fd\u7cfb\u7edf\u548c\u9ad8\u6548\u6ee4\u82af\u7ec4\u6210\uff0c\u5176\u4e2d\u6db2\u69fd\u8d1f\u8d23\u63d0\u4f9b\u7a33\u5b9a\u7684\u6db2\u4f53\u73af\u5883\u4ee5\u589e\u5f3a\u8fc7\u6ee4\u6548\u679c\uff0c\u800c\u9ad8\u6548\u6ee4\u82af\u5219\u5229\u7528\u7269\u7406\u5438\u9644\u3001\u5316\u5b66\u53cd\u5e94\u6216\u9759\u7535\u6548\u5e94\u7b49\u673a\u5236\u5b8c\u6210\u5bf9\u76ee\u6807\u6c61\u67d3\u7269\u7684\u6355\u83b7\u3002\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6838\u5fc3\u4f18\u52bf\u5728\u4e8e\u5176\u9ad8\u7cbe\u5ea6\u8fc7\u6ee4\u80fd\u529b\uff0c\u80fd\u591f\u6709\u6548\u62e6\u622a\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\u7269\uff08\u5982PM0.1\uff09\uff0c\u540c\u65f6\u5177\u5907\u4f4e\u963b\u529b\u3001\u957f\u5bff\u547d\u53ca\u6613\u4e8e\u7ef4\u62a4\u7684\u7279\u70b9\u3002<\/p>\n

\u5728\u7cbe\u5bc6\u5236\u9020\u9886\u57df\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u4f5c\u7528\u5c24\u4e3a\u7a81\u51fa\u3002\u9996\u5148\uff0c\u5b83\u4e3a\u6d01\u51c0\u5ba4\u63d0\u4f9b\u4e86\u7a33\u5b9a\u4e14\u9ad8\u8d28\u91cf\u7684\u7a7a\u6c14\u51c0\u5316\u89e3\u51b3\u65b9\u6848\uff0c\u786e\u4fdd\u751f\u4ea7\u73af\u5883\u8fbe\u5230ISO 14644-1\u6807\u51c6\u6240\u89c4\u5b9a\u7684\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42\u3002\u5176\u6b21\uff0c\u5728\u534a\u5bfc\u4f53\u5236\u9020\u3001\u5149\u5b66\u5668\u4ef6\u52a0\u5de5\u4ee5\u53ca\u751f\u7269\u5236\u836f\u7b49\u884c\u4e1a\u4e2d\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u80fd\u591f\u663e\u8457\u964d\u4f4e\u7a7a\u6c14\u4e2d\u9897\u7c92\u7269\u6d53\u5ea6\uff0c\u4ece\u800c\u51cf\u5c11\u4ea7\u54c1\u8868\u9762\u6c61\u67d3\u7684\u98ce\u9669\uff0c\u63d0\u9ad8\u826f\u54c1\u7387\u3002\u6b64\u5916\uff0c\u8be5\u8bbe\u5907\u8fd8\u5177\u6709\u8f83\u5f3a\u7684\u9002\u5e94\u6027\uff0c\u80fd\u591f\u6839\u636e\u4e0d\u540c\u5de5\u827a\u9700\u6c42\u8c03\u6574\u8fc7\u6ee4\u6548\u7387\u548c\u6027\u80fd\u53c2\u6570\uff0c\u6ee1\u8db3\u591a\u6837\u5316\u5e94\u7528\u573a\u666f\u7684\u9700\u6c42\u3002<\/p>\n

\u4ee5\u4e0b\u5c06\u4ece\u4ea7\u54c1\u53c2\u6570\u3001\u56fd\u5185\u5916\u5e94\u7528\u73b0\u72b6\u53ca\u6280\u672f\u53d1\u5c55\u7b49\u591a\u4e2a\u7ef4\u5ea6\u8fdb\u4e00\u6b65\u63a2\u8ba8\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u7cbe\u5bc6\u5236\u9020\u4e2d\u7684\u5177\u4f53\u8868\u73b0\u53ca\u5176\u91cd\u8981\u6027\u3002<\/p>\n

---

\n

\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u4ea7\u54c1\u53c2\u6570\u8be6\u89e3<\/h3>\n

\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u53c2\u6570\u76f4\u63a5\u51b3\u5b9a\u4e86\u5176\u5728\u7cbe\u5bc6\u5236\u9020\u4e2d\u7684\u9002\u7528\u6027\u548c\u6548\u679c\u3002\u4ee5\u4e0b\u662f\u51e0\u4e2a\u5173\u952e\u53c2\u6570\u53ca\u5176\u5177\u4f53\u542b\u4e49\uff1a<\/p>\n

1. \u8fc7\u6ee4\u6548\u7387<\/h4>\n

\u8fc7\u6ee4\u6548\u7387\u662f\u6307\u8fc7\u6ee4\u5668\u80fd\u591f\u53bb\u9664\u7684\u76ee\u6807\u9897\u7c92\u7269\u6bd4\u4f8b\uff0c\u901a\u5e38\u7528\u767e\u5206\u6bd4\u8868\u793a\u3002\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 29463-3\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u8fc7\u6ee4\u6548\u7387\u53ef\u4ee5\u5206\u4e3a\u4ee5\u4e0b\u51e0\u4e2a\u7b49\u7ea7\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n

\u7b49\u7ea7<\/th>\n	\u9897\u7c92\u7269\u5c3a\u5bf8\u8303\u56f4 (\u03bcm)<\/th>\n	\u4f4e\u8fc7\u6ee4\u6548\u7387 (%)<\/th>\n<\/tr>\n<\/thead>\n
H10<\/td>\n	\u22650.5<\/td>\n	85<\/td>\n<\/tr>\n
H11<\/td>\n	\u22650.5<\/td>\n	90<\/td>\n<\/tr>\n
H12<\/td>\n	\u22650.5<\/td>\n	95<\/td>\n<\/tr>\n
H13<\/td>\n	\u22650.3<\/td>\n	99.5<\/td>\n<\/tr>\n
H14<\/td>\n	\u22650.3<\/td>\n	99.95<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u5728\u7cbe\u5bc6\u5236\u9020\u9886\u57df\uff0cH13\u548cH14\u7ea7\u522b\u7684\u8fc7\u6ee4\u5668\u4e3a\u5e38\u7528\uff0c\u56e0\u4e3a\u5b83\u4eec\u80fd\u591f\u6709\u6548\u53bb\u9664\u6781\u5c0f\u9897\u7c92\u7269\uff0c\u6ee1\u8db3\u9ad8\u6d01\u51c0\u5ea6\u8981\u6c42\u3002<\/p>\n 2. \u521d\u963b\u529b\u4e0e\u7ec8\u963b\u529b<\/h4>\n \u521d\u963b\u529b\u662f\u6307\u8fc7\u6ee4\u5668\u5b89\u88c5\u540e\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u521d\u59cb\u538b\u964d\uff0c\u800c\u7ec8\u963b\u529b\u5219\u662f\u6307\u8fc7\u6ee4\u5668\u56e0\u79ef\u5c18\u5bfc\u81f4\u5931\u6548\u65f6\u7684\u5927\u5141\u8bb8\u538b\u964d\u3002\u8fd9\u4e24\u4e2a\u53c2\u6570\u76f4\u63a5\u5f71\u54cd\u80fd\u8017\u548c\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n\n\n\n\n\n\n \u53c2\u6570<\/th>\n \u5355\u4f4d<\/th>\n \u5e38\u89c1\u503c\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n \u521d\u963b\u529b<\/td>\n Pa<\/td>\n 100\u2013250<\/td>\n<\/tr>\n \u7ec8\u963b\u529b<\/td>\n Pa<\/td>\n 300\u2013500<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u8f83\u4f4e\u7684\u521d\u963b\u529b\u6709\u52a9\u4e8e\u51cf\u5c11\u98ce\u673a\u529f\u8017\uff0c\u800c\u5408\u7406\u7684\u7ec8\u963b\u529b\u8bbe\u8ba1\u53ef\u5ef6\u957f\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5468\u671f\u3002<\/p>\n 3. \u4f7f\u7528\u5bff\u547d<\/h4>\n \u4f7f\u7528\u5bff\u547d\u53d6\u51b3\u4e8e\u8fc7\u6ee4\u5668\u6750\u8d28\u3001\u5de5\u4f5c\u73af\u5883\u4ee5\u53ca\u7ef4\u62a4\u9891\u7387\u3002\u4e00\u822c\u60c5\u51b5\u4e0b\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5bff\u547d\u4e3a1-3\u5e74\u3002<\/p>\n\n\n\n\n\n\n \u5de5\u4f5c\u6761\u4ef6<\/th>\n \u5bff\u547d\u8303\u56f4 (\u5e74)<\/th>\n<\/tr>\n<\/thead>\n \u6807\u51c6\u5de5\u4e1a\u73af\u5883<\/td>\n 1\u20132<\/td>\n<\/tr>\n \u9ad8\u6e7f\u5ea6\/\u8150\u8680\u6027\u73af\u5883<\/td>\n \u22641<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n 4. \u5c3a\u5bf8\u4e0e\u63a5\u53e3\u5f62\u5f0f<\/h4>\n \u8fc7\u6ee4\u5668\u7684\u5c3a\u5bf8\u9700\u4e0e\u901a\u98ce\u7cfb\u7edf\u76f8\u5339\u914d\uff0c\u5e38\u89c1\u7684\u89c4\u683c\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n \u89c4\u683c\u578b\u53f7<\/th>\n \u5916\u5f62\u5c3a\u5bf8 (mm)<\/th>\n \u6ee4\u82af\u6df1\u5ea6 (mm)<\/th>\n<\/tr>\n<\/thead>\n EUF-610\u00d7610<\/td>\n 610\u00d7610<\/td>\n 292<\/td>\n<\/tr>\n EUF-1220\u00d7610<\/td>\n 1220\u00d7610<\/td>\n 292<\/td>\n<\/tr>\n EUF-1220\u00d71220<\/td>\n 1220\u00d71220<\/td>\n 292<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u63a5\u53e3\u5f62\u5f0f\u901a\u5e38\u5305\u62ec\u6cd5\u5170\u8fde\u63a5\u548c\u87ba\u7eb9\u8fde\u63a5\uff0c\u4fbf\u4e8e\u5b89\u88c5\u548c\u62c6\u5378\u3002<\/p>\n 5. \u6750\u8d28\u4e0e\u8010\u6e29\u6027<\/h4>\n \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6750\u8d28\u9009\u62e9\u5bf9\u5176\u6027\u80fd\u81f3\u5173\u91cd\u8981\u3002\u5e38\u89c1\u6750\u8d28\u53ca\u5176\u8010\u6e29\u8303\u56f4\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n \u6750\u8d28\u7c7b\u578b<\/th>\n \u8010\u6e29\u8303\u56f4 (\u00b0C)<\/th>\n \u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n \u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8<\/td>\n -40~120<\/td>\n \u9ad8\u6548\u8fc7\u6ee4\uff0c\u8010\u8150\u8680\u6027\u5f3a<\/td>\n<\/tr>\n PTFE\u6d82\u5c42\u6ee4\u6750<\/td>\n -70~260<\/td>\n \u6297\u5316\u5b66\u8150\u8680\uff0c\u9632\u6c34\u6027\u80fd\u597d<\/td>\n<\/tr>\n \u4e0d\u9508\u94a2\u7f51<\/td>\n -200~500<\/td>\n \u8010\u9ad8\u6e29\u9ad8\u538b\uff0c\u9002\u7528\u4e8e\u6781\u7aef\u73af\u5883<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u4ee5\u4e0a\u53c2\u6570\u5171\u540c\u51b3\u5b9a\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u8868\u73b0\u3002\u5408\u7406\u9009\u62e9\u8fd9\u4e9b\u53c2\u6570\u5bf9\u4e8e\u4f18\u5316\u7cbe\u5bc6\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u7a7a\u6c14\u8d28\u91cf\u81f3\u5173\u91cd\u8981\u3002<\/p>\n \n \u56fd\u5185\u5916\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u73b0\u72b6\u5bf9\u6bd4<\/h3>\n \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u73b0\u4ee3\u5de5\u4e1a\u7684\u91cd\u8981\u7ec4\u6210\u90e8\u5206\uff0c\u5728\u5168\u7403\u8303\u56f4\u5185\u5f97\u5230\u4e86\u5e7f\u6cdb\u7684\u5e94\u7528\u3002\u4e0d\u540c\u56fd\u5bb6\u548c\u5730\u533a\u7531\u4e8e\u6280\u672f\u6c34\u5e73\u3001\u5e02\u573a\u9700\u6c42\u53ca\u653f\u7b56\u5bfc\u5411\u7684\u5dee\u5f02\uff0c\u5728\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7814\u53d1\u4e0e\u5e94\u7528\u4e0a\u5448\u73b0\u51fa\u663e\u8457\u7279\u70b9\u3002<\/p>\n \u56fd\u5185\u5e94\u7528\u73b0\u72b6<\/h4>\n \u5728\u4e2d\u56fd\uff0c\u968f\u7740\u201c\u4e2d\u56fd\u5236\u90202025\u201d\u6218\u7565\u7684\u63a8\u8fdb\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u9010\u6e10\u6210\u4e3a\u9ad8\u7aef\u5236\u9020\u4e1a\u4e0d\u53ef\u6216\u7f3a\u7684\u6280\u672f\u652f\u6491\u5de5\u5177\u3002\u7279\u522b\u662f\u5728\u534a\u5bfc\u4f53\u884c\u4e1a\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6676\u5706\u5236\u9020\u8f66\u95f4\u7684\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u4e2d\u3002\u4f8b\u5982\uff0c\u534e\u4e3a\u6d77\u601d\u534a\u5bfc\u4f53\u5de5\u5382\u91c7\u7528\u4e86\u56fd\u4ea7\u5316\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u5b9e\u73b0\u4e86\u5bf9\u8d85\u51c0\u95f4\u5185PM0.1\u9897\u7c92\u7269\u7684\u6709\u6548\u63a7\u5236\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u53ef\u8fbe99.99%\uff08H14\u7ea7\u522b\uff09\u3002\u6b64\u5916\uff0c\u4e2d\u56fd\u751f\u7269\u533b\u836f\u4f01\u4e1a\u5982\u6052\u745e\u533b\u836f\u4e5f\u5728\u65e0\u83cc\u5236\u5242\u751f\u4ea7\u7ebf\u4e2d\u5f15\u5165\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u4ee5\u786e\u4fdd\u836f\u54c1\u751f\u4ea7\u7684\u6d01\u51c0\u5ea6\u7b26\u5408GMP\u6807\u51c6\u3002<\/p>\n \u56fd\u5185\u5382\u5546\u8fd1\u5e74\u6765\u5728\u6280\u672f\u7814\u53d1\u65b9\u9762\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\u3002\u4f8b\u5982\uff0c\u82cf\u5dde\u67d0\u77e5\u540d\u8fc7\u6ee4\u5668\u5236\u9020\u5546\u5f00\u53d1\u4e86\u4e00\u6b3e\u57fa\u4e8e\u7eb3\u7c73\u7ea4\u7ef4\u6750\u6599\u7684\u65b0\u578b\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u76f8\u6bd4\u4f20\u7edf\u4ea7\u54c1\u63d0\u5347\u4e8610%\uff0c\u540c\u65f6\u964d\u4f4e\u4e8625%\u7684\u8fd0\u884c\u80fd\u8017\u3002\u7136\u800c\uff0c\u56fd\u5185\u4f01\u4e1a\u5728\u9ad8\u6027\u80fd\u6750\u6599\u9886\u57df\u7684\u81ea\u4e3b\u7814\u53d1\u80fd\u529b\u4ecd\u663e\u4e0d\u8db3\uff0c\u90e8\u5206\u6838\u5fc3\u90e8\u4ef6\u4f9d\u8d56\u8fdb\u53e3\u3002<\/p>\n \u56fd\u5916\u5e94\u7528\u73b0\u72b6<\/h4>\n \u56fd\u5916\u53d1\u8fbe\u56fd\u5bb6\u5728\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u9886\u57df\u7684\u6280\u672f\u79ef\u7d2f\u66f4\u4e3a\u6df1\u539a\u3002\u7f8e\u56fd\u3001\u5fb7\u56fd\u548c\u65e5\u672c\u7b49\u56fd\u5bb6\u7684\u4f01\u4e1a\u4e0d\u4ec5\u6ce8\u91cd\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u63d0\u5347\uff0c\u8fd8\u5f3a\u8c03\u667a\u80fd\u5316\u548c\u96c6\u6210\u5316\u8bbe\u8ba1\u3002\u4ee5\u7f8e\u56fdCamfil\u516c\u53f8\u4e3a\u4f8b\uff0c\u5176\u63a8\u51fa\u7684InteCore\u7cfb\u5217\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u91c7\u7528\u6a21\u5757\u5316\u8bbe\u8ba1\u7406\u5ff5\uff0c\u652f\u6301\u8fdc\u7a0b\u76d1\u63a7\u548c\u81ea\u52a8\u62a5\u8b66\u529f\u80fd\uff0c\u5927\u5e45\u63d0\u9ad8\u4e86\u8bbe\u5907\u7684\u53ef\u9760\u6027\u548c\u7ef4\u62a4\u6548\u7387\u3002\u6b64\u5916\uff0c\u5fb7\u56fdMann+Hummel\u516c\u53f8\u7684\u4ea7\u54c1\u4ee5\u5176\u5353\u8d8a\u7684\u8010\u4e45\u6027\u548c\u6297\u8150\u8680\u6027\u80fd\u8457\u79f0\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u822a\u7a7a\u822a\u5929\u9886\u57df\u3002<\/p>\n \u5728\u65e5\u672c\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u5df2\u6e17\u900f\u81f3\u591a\u4e2a\u5c16\u7aef\u884c\u4e1a\u3002\u4f8b\u5982\uff0c\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff09\u5728\u5176\u5148\u8fdb\u5149\u523b\u8bbe\u5907\u4e2d\u96c6\u6210\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u66dd\u5149\u8fc7\u7a0b\u4e2d\u4e0d\u4f1a\u56e0\u7a7a\u6c14\u6c61\u67d3\u5f71\u54cd\u82af\u7247\u8d28\u91cf\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u65e5\u672c\u79d1\u7814\u673a\u6784\u8fd8\u5f00\u5c55\u4e86\u5173\u4e8e\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6781\u7aef\u73af\u5883\u4e0b\u4f7f\u7528\u7684\u4e13\u9879\u7814\u7a76\uff0c\u5982\u6838\u80fd\u8bbe\u65bd\u4e2d\u7684\u653e\u5c04\u6027\u7c92\u5b50\u6355\u83b7\u6280\u672f\u3002<\/p>\n \u4e2d\u5916\u5bf9\u6bd4\u5206\u6790<\/h4>\n \u901a\u8fc7\u5bf9\u6bd4\u53ef\u4ee5\u770b\u51fa\uff0c\u56fd\u5185\u5916\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u5b58\u5728\u4ee5\u4e0b\u51e0\u70b9\u5dee\u5f02\uff1a<\/p>\n \n \u6280\u672f\u6c34\u5e73<\/strong>\uff1a\u56fd\u5916\u4f01\u4e1a\u666e\u904d\u5177\u5907\u66f4\u5f3a\u7684\u7814\u53d1\u5b9e\u529b\u548c\u521b\u65b0\u80fd\u529b\uff0c\u5c24\u5176\u662f\u5728\u65b0\u6750\u6599\u5f00\u53d1\u548c\u667a\u80fd\u63a7\u5236\u65b9\u9762\u5904\u4e8e\u9886\u5148\u5730\u4f4d\u3002<\/li>\n \u5e02\u573a\u5b9a\u4f4d<\/strong>\uff1a\u56fd\u5185\u4ea7\u54c1\u66f4\u503e\u5411\u4e8e\u6ee1\u8db3\u4e2d\u4f4e\u7aef\u5e02\u573a\u9700\u6c42\uff0c\u800c\u56fd\u5916\u54c1\u724c\u5219\u805a\u7126\u4e8e\u9ad8\u7aef\u5b9a\u5236\u5316\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n \u653f\u7b56\u652f\u6301<\/strong>\uff1a\u4e2d\u56fd\u653f\u5e9c\u8fd1\u5e74\u6765\u52a0\u5927\u5bf9\u73af\u4fdd\u548c\u667a\u80fd\u5236\u9020\u9886\u57df\u7684\u6276\u6301\u529b\u5ea6\uff0c\u63a8\u52a8\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u56fd\u5185\u7684\u666e\u53ca\uff1b\u76f8\u6bd4\u4e4b\u4e0b\uff0c\u6b27\u7f8e\u56fd\u5bb6\u66f4\u591a\u4f9d\u9760\u6210\u719f\u7684\u4ea7\u4e1a\u94fe\u4f53\u7cfb\u548c\u4e25\u683c\u7684\u6807\u51c6\u89c4\u8303\u6765\u4fc3\u8fdb\u6280\u672f\u5347\u7ea7\u3002<\/li>\n<\/ol>\n \u7efc\u4e0a\u6240\u8ff0\uff0c\u5c3d\u7ba1\u56fd\u5185\u5916\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5e94\u7528\u5c42\u9762\u5404\u6709\u4fa7\u91cd\uff0c\u4f46\u968f\u7740\u5168\u7403\u5316\u8fdb\u7a0b\u7684\u52a0\u5feb\u548c\u6280\u672f\u58c1\u5792\u7684\u9010\u6b65\u6253\u7834\uff0c\u672a\u6765\u53cc\u65b9\u7684\u5408\u4f5c\u4e0e\u7ade\u4e89\u5c06\u8fdb\u4e00\u6b65\u6df1\u5316\u3002<\/p>\n \n \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u7cbe\u5bc6\u5236\u9020\u4e2d\u7684\u6280\u672f\u53d1\u5c55\u4e0e\u521b\u65b0\u8d8b\u52bf<\/h3>\n \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53d1\u5c55\u6b63\u671d\u7740\u66f4\u9ad8\u7cbe\u5ea6\u3001\u66f4\u4f4e\u80fd\u8017\u548c\u66f4\u667a\u80fd\u7684\u65b9\u5411\u8fc8\u8fdb\u3002\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5916\u5b66\u8005\u56f4\u7ed5\u8fd9\u4e00\u4e3b\u9898\u5c55\u5f00\u4e86\u6df1\u5165\u7814\u7a76\uff0c\u5e76\u53d6\u5f97\u4e86\u4e00\u7cfb\u5217\u7a81\u7834\u6027\u6210\u679c\u3002\u4ee5\u4e0b\u5c06\u4ece\u6750\u6599\u6539\u8fdb\u3001\u7ed3\u6784\u4f18\u5316\u53ca\u667a\u80fd\u5316\u7ba1\u7406\u4e09\u4e2a\u7ef4\u5ea6\u63a2\u8ba8\u5176\u65b0\u6280\u672f\u8fdb\u5c55\u3002<\/p>\n 1. \u6750\u6599\u6539\u8fdb\uff1a\u65b0\u578b\u529f\u80fd\u6027\u6ee4\u6750\u7684\u5f00\u53d1<\/h4>\n \u6ee4\u6750\u7684\u9009\u62e9\u76f4\u63a5\u51b3\u5b9a\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u4e0a\u9650\u3002\u8fd1\u5e74\u6765\uff0c\u7814\u7a76\u4eba\u5458\u5f00\u59cb\u63a2\u7d22\u5177\u6709\u7279\u6b8a\u529f\u80fd\u7684\u65b0\u578b\u6ee4\u6750\uff0c\u4ee5\u6ee1\u8db3\u66f4\u9ad8\u6807\u51c6\u7684\u8fc7\u6ee4\u9700\u6c42\u3002\u4f8b\u5982\uff0c\u7f8e\u56fd\u5bc6\u6b47\u6839\u5927\u5b66\u7684\u7814\u7a76\u56e2\u961f\u63d0\u51fa\u4e86\u4e00\u79cd\u57fa\u4e8e\u77f3\u58a8\u70ef\u6c27\u5316\u7269\u7684\u590d\u5408\u6ee4\u6750\uff0c\u8be5\u6750\u6599\u5177\u5907\u4f18\u5f02\u7684\u5bfc\u7535\u6027\u548c\u673a\u68b0\u5f3a\u5ea6\uff0c\u540c\u65f6\u80fd\u591f\u6709\u6548\u6355\u6349\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\u7269\u3002\u5b9e\u9a8c\u6570\u636e\u663e\u793a\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u8f83\u4f20\u7edf\u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8\u63d0\u5347\u4e86\u7ea615%\uff08\u6587\u732e\u6765\u6e90\uff1aScience Advances, 2021\uff09\u3002<\/p>\n \u56fd\u5185\u76f8\u5173\u7814\u7a76\u540c\u6837\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\u3002\u4e2d\u79d1\u9662\u5b81\u6ce2\u6750\u6599\u6280\u672f\u4e0e\u5de5\u7a0b\u7814\u7a76\u6240\u5f00\u53d1\u4e86\u4e00\u79cd\u591a\u5b54\u9676\u74f7\u57fa\u6ee4\u6750\uff0c\u8be5\u6750\u6599\u5177\u6709\u826f\u597d\u7684\u8010\u9ad8\u6e29\u7279\u6027\u548c\u5316\u5b66\u7a33\u5b9a\u6027\uff0c\u7279\u522b\u9002\u5408\u7528\u4e8e\u9ad8\u6e29\u73af\u5883\u4e0b\u7684\u6c14\u4f53\u51c0\u5316\u3002\u6b64\u5916\uff0c\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662\u7684\u4e00\u9879\u7814\u7a76\u8868\u660e\uff0c\u901a\u8fc7\u5728\u6ee4\u6750\u8868\u9762\u6d82\u8986\u4e8c\u6c27\u5316\u949b\u7eb3\u7c73\u9897\u7c92\uff0c\u53ef\u4ee5\u663e\u8457\u589e\u5f3a\u5176\u5149\u50ac\u5316\u5206\u89e3\u6709\u673a\u6c61\u67d3\u7269\u7684\u80fd\u529b\uff08\u6587\u732e\u6765\u6e90\uff1aEnvironmental Science & Technology, 2020\uff09\u3002<\/p>\n\n\n\n\n\n\n\n \u6280\u672f\u65b9\u5411<\/th>\n \u5173\u952e\u7279\u6027<\/th>\n \u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n \u77f3\u58a8\u70ef\u590d\u5408\u6ee4\u6750<\/td>\n \u9ad8\u5bfc\u7535\u6027\u3001\u5f3a\u5438\u9644\u80fd\u529b<\/td>\n \u534a\u5bfc\u4f53\u5236\u9020\u3001\u9502\u7535\u6c60\u751f\u4ea7<\/td>\n<\/tr>\n \u591a\u5b54\u9676\u74f7\u6ee4\u6750<\/td>\n \u8010\u9ad8\u6e29\u3001\u8010\u8150\u8680<\/td>\n \u9ad8\u6e29\u71c3\u70e7\u5e9f\u6c14\u5904\u7406<\/td>\n<\/tr>\n \u5149\u50ac\u5316\u6ee4\u6750<\/td>\n \u5206\u89e3\u6709\u673a\u6c61\u67d3\u7269<\/td>\n \u751f\u7269\u5236\u836f\u3001\u98df\u54c1\u52a0\u5de5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n 2. \u7ed3\u6784\u4f18\u5316\uff1a\u7d27\u51d1\u578b\u8bbe\u8ba1\u4e0e\u6a21\u5757\u5316\u65b9\u6848<\/h4>\n \u4e3a\u4e86\u9002\u5e94\u7cbe\u5bc6\u5236\u9020\u5bf9\u7a7a\u95f4\u5229\u7528\u7387\u7684\u8981\u6c42\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7ed3\u6784\u8bbe\u8ba1\u6b63\u5728\u4e0d\u65ad\u4f18\u5316\u3002\u5fb7\u56fdFraunhofer\u7814\u7a76\u6240\u63d0\u51fa\u4e86\u4e00\u79cd\u7d27\u51d1\u578b\u6db2\u69fd\u8fc7\u6ee4\u5668\u8bbe\u8ba1\u65b9\u6848\uff0c\u901a\u8fc7\u7f29\u5c0f\u6db2\u69fd\u4f53\u79ef\u5e76\u4f18\u5316\u6d41\u9053\u5e03\u5c40\uff0c\u4f7f\u8bbe\u5907\u7684\u6574\u4f53\u5c3a\u5bf8\u51cf\u5c11\u4e86\u8fd130%\uff0c\u540c\u65f6\u4fdd\u6301\u4e86\u539f\u6709\u7684\u8fc7\u6ee4\u6548\u7387\u3002\u8fd9\u79cd\u8bbe\u8ba1\u5c24\u5176\u9002\u7528\u4e8e\u7a7a\u95f4\u6709\u9650\u7684\u6d01\u51c0\u5ba4\u73af\u5883\u3002<\/p>\n \u6a21\u5757\u5316\u8bbe\u8ba1\u7406\u5ff5\u4e5f\u9010\u6e10\u6210\u4e3a\u4e3b\u6d41\u8d8b\u52bf\u3002\u8377\u5170Airtech\u516c\u53f8\u63a8\u51fa\u7684\u4e00\u6b3e\u6a21\u5757\u5316\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7cfb\u7edf\uff0c\u5141\u8bb8\u7528\u6237\u6839\u636e\u5b9e\u9645\u9700\u6c42\u7075\u6d3b\u8c03\u6574\u6ee4\u82af\u6570\u91cf\u548c\u6392\u5217\u65b9\u5f0f\u3002\u8fd9\u4e00\u521b\u65b0\u4e0d\u4ec5\u7b80\u5316\u4e86\u5b89\u88c5\u6d41\u7a0b\uff0c\u8fd8\u663e\u8457\u964d\u4f4e\u4e86\u7ef4\u62a4\u6210\u672c\u3002\u6b64\u5916\uff0c\u6a21\u5757\u5316\u8bbe\u8ba1\u8fd8\u6709\u52a9\u4e8e\u5b9e\u73b0\u5feb\u901f\u66f4\u6362\u548c\u5347\u7ea7\uff0c\u4ece\u800c\u5ef6\u957f\u8bbe\u5907\u7684\u5168\u751f\u547d\u5468\u671f\u4ef7\u503c\u3002<\/p>\n\n\n\n\n\n\n \u8bbe\u8ba1\u65b9\u5411<\/th>\n \u4e3b\u8981\u4f18\u52bf<\/th>\n \u5b9e\u9645\u6848\u4f8b<\/th>\n<\/tr>\n<\/thead>\n \u7d27\u51d1\u578b\u8bbe\u8ba1<\/td>\n \u51cf\u5c11\u5360\u5730\u9762\u79ef\u3001\u63d0\u9ad8\u80fd\u6548<\/td>\n \u5fae\u7535\u5b50\u5c01\u88c5\u751f\u4ea7\u7ebf<\/td>\n<\/tr>\n \u6a21\u5757\u5316\u65b9\u6848<\/td>\n \u6613\u4e8e\u6269\u5c55\u3001\u964d\u4f4e\u7ef4\u62a4\u6210\u672c<\/td>\n \u533b\u7597\u5668\u68b0\u706d\u83cc\u8bbe\u5907<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n 3. \u667a\u80fd\u5316\u7ba1\u7406\uff1a\u7269\u8054\u7f51\u4e0e\u5927\u6570\u636e\u6280\u672f\u7684\u5e94\u7528<\/h4>\n \u968f\u7740\u5de5\u4e1a4.0\u65f6\u4ee3\u7684\u5230\u6765\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u6b63\u9010\u6b65\u5411\u667a\u80fd\u5316\u65b9\u5411\u8f6c\u578b\u3002\u901a\u8fc7\u96c6\u6210\u4f20\u611f\u5668\u3001\u63a7\u5236\u5668\u548c\u901a\u4fe1\u6a21\u5757\uff0c\u8bbe\u5907\u53ef\u4ee5\u5b9e\u65f6\u76d1\u6d4b\u8fd0\u884c\u72b6\u6001\u5e76\u751f\u6210\u6570\u636e\u62a5\u544a\u3002\u4f8b\u5982\uff0c\u97e9\u56fdLG\u5316\u5b66\u5f00\u53d1\u4e86\u4e00\u5957\u57fa\u4e8e\u7269\u8054\u7f51\u7684\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7ba1\u7406\u7cfb\u7edf\uff0c\u8be5\u7cfb\u7edf\u80fd\u591f\u81ea\u52a8\u8bb0\u5f55\u538b\u5dee\u53d8\u5316\u3001\u6e29\u5ea6\u6ce2\u52a8\u7b49\u5173\u952e\u53c2\u6570\uff0c\u5e76\u901a\u8fc7\u4e91\u7aef\u5e73\u53f0\u8fdb\u884c\u5206\u6790\u9884\u6d4b\uff0c\u63d0\u524d\u9884\u8b66\u53ef\u80fd\u53d1\u751f\u7684\u6545\u969c\u3002<\/p>\n \u6b64\u5916\uff0c\u5927\u6570\u636e\u6280\u672f\u4e5f\u88ab\u5f15\u5165\u5230\u8fc7\u6ee4\u5668\u6027\u80fd\u8bc4\u4f30\u4e2d\u3002\u7f8e\u56fd\u675c\u514b\u5927\u5b66\u7684\u4e00\u9879\u7814\u7a76\u5229\u7528\u673a\u5668\u5b66\u4e60\u7b97\u6cd5\u5efa\u7acb\u4e86\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u9884\u6d4b\u6a21\u578b\uff0c\u901a\u8fc7\u5bf9\u5386\u53f2\u6570\u636e\u7684\u6316\u6398\uff0c\u51c6\u786e\u9884\u6d4b\u4e86\u4e0d\u540c\u5de5\u51b5\u4e0b\u7684\u8fc7\u6ee4\u6548\u7387\u8870\u51cf\u66f2\u7ebf\uff08\u6587\u732e\u6765\u6e90\uff1aJournal of Cleaner Production, 2022\uff09\u3002\u8fd9\u79cd\u65b9\u6cd5\u4e3a\u5236\u5b9a\u79d1\u5b66\u7684\u7ef4\u62a4\u8ba1\u5212\u63d0\u4f9b\u4e86\u6709\u529b\u652f\u6301\u3002<\/p>\n\n\n\n\n\n\n\n \u667a\u80fd\u5316\u529f\u80fd<\/th>\n \u6838\u5fc3\u6280\u672f<\/th>\n \u5b9e\u73b0\u6548\u679c<\/th>\n<\/tr>\n<\/thead>\n \u5b9e\u65f6\u76d1\u6d4b<\/td>\n \u538b\u5dee\u4f20\u611f\u5668\u3001\u6e29\u6e7f\u5ea6\u63a2\u5934<\/td>\n \u63d0\u4f9b\u7cbe\u51c6\u7684\u8fd0\u884c\u72b6\u6001\u53cd\u9988<\/td>\n<\/tr>\n \u6545\u969c\u9884\u8b66<\/td>\n \u6570\u636e\u5206\u6790\u3001AI\u8bca\u65ad<\/td>\n \u907f\u514d\u7a81\u53d1\u505c\u673a\u4e8b\u6545<\/td>\n<\/tr>\n \u6027\u80fd\u9884\u6d4b<\/td>\n \u673a\u5668\u5b66\u4e60\u3001\u5927\u6570\u636e\u5efa\u6a21<\/td>\n \u4f18\u5316\u7ef4\u62a4\u7b56\u7565\uff0c\u5ef6\u957f\u8bbe\u5907\u5bff\u547d<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n \u7efc\u4e0a\u6240\u8ff0\uff0c\u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53d1\u5c55\u6b63\u4f9d\u6258\u4e8e\u65b0\u6750\u6599\u3001\u65b0\u7ed3\u6784\u548c\u65b0\u6280\u672f\u7684\u534f\u540c\u521b\u65b0\uff0c\u4e3a\u7cbe\u5bc6\u5236\u9020\u9886\u57df\u5e26\u6765\u4e86\u66f4\u52a0\u9ad8\u6548\u7684\u7a7a\u6c14\u51c0\u5316\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n \n \u53c2\u8003\u6587\u732e<\/h3>\n [1] Science Advances. "Graphene Oxide-Based Composite Materials for Air Filtration Applications." 2021.<\/p>\n [2] Environmental Science & Technology. "Photocatalytic Decomposition of Organic Pollutants Using TiO2-Coated Filter Media." 2020.<\/p>\n [3] Journal of Cleaner Production. "Performance Prediction Model for Liquid Trough HEPA Filters Using Machine Learning Techniques." 2022.<\/p>\n [4] Fraunhofer Institute. "Compact Design Solutions for High-Efficiency Air Filtration Systems." Technical Report, 2021.<\/p>\n [5] LG Chemical. "IoT-Based Management System for Liquid Trough HEPA Filters." White Paper, 2022.<\/p>\n [6] ISO 29463-3:2011. "High Efficiency Particulate Air (HEPA) and Ultra Low Penetration Air (ULPA) Filters \u2013 Part 3: Classification, Performance Testing, Marking."<\/p>\n [7] \u767e\u5ea6\u767e\u79d1. \u201c\u9ad8\u6548\u8fc7\u6ee4\u5668.\u201d https:\/\/baike.baidu.com\/item\/%E9%AB%98%E6%95%88%E8%BF%87%E6%BB%A4%E5%99%A8<\/p>\n \u4e1a\u52a1\u8054\u7cfb\uff1a\u5f20\u5c0f\u59d0189 1490 9236\u5fae\u4fe1\u540c\u53f7<\/strong><\/h2>\n","protected":false},"excerpt":{"rendered":" \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5b9a\u4e49\u4e0e\u4f5c\u7528 \u6db2\u69fd\u9ad8\u6548\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u5728\u7cbe\u5bc6\u5236\u9020\u4e2d\u5e7f\u6cdb\u5e94\u7528\u7684\u5173\u952e\u8bbe\u5907\uff0c\u5176\u4e3b\u8981\u529f\u80fd\u662f\u901a\u8fc7\u6db2\u4f53\u4ecb\u8d28\u5b9e\u73b0\u5bf9\u7a7a\u6c14\u6216\u6c14\u4f53\u4e2d\u7684\u5fae\u5c0f\u9897\u7c92\u7269\u3001\u6709\u5bb3… <\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[35],"_links":{"self":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts\/5754"}],"collection":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/comments?post=5754"}],"version-history":[{"count":0,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/posts\/5754\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/media?parent=5754"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/categories?post=5754"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.huaxingsi.com\/wp-json\/wp\/v2\/tags?post=5754"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}